Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8164879 | Step down dechucking | Peter Mok, Jason Hong, Steven Fong, Gongyuan Qu | 2012-04-24 |
| 6632482 | Plasma immersion ion implantation process | — | 2003-10-14 |
| 5572038 | Charge monitor for high potential pulse current dose measurement apparatus and method | Charles Cooper, Susan Felch, Charles E. Van Wagoner | 1996-11-05 |
| 5354381 | Plasma immersion ion implantation (PI.sup.3) apparatus | — | 1994-10-11 |