Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6934006 | Exposure apparatus and exposure method for use in forming a pattern of a semiconductor device | Bong-Ki Lee | 2005-08-23 |
| 6786970 | Equipment for fabricating a semiconductor product | Hyun-Don Oh | 2004-09-07 |
| 6774055 | In-line system having overlay accuracy measurement function and method for the same | Jae Young Choi | 2004-08-10 |
| 6436609 | Photolithographic apparatus composed of coater/developer and a plurality of steppers in parallel connected thereto | — | 2002-08-20 |
| 6239859 | Photolithographic apparatus composed of coater/developer and a plurality of steppers in parallel connected thereto | — | 2001-05-29 |
| 6042649 | Polyimide coating device having a polyimide supply status sensing device | Kyung-suu Song, Tae-un Lim, Sung Il Jung | 2000-03-28 |