Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6786970 | Equipment for fabricating a semiconductor product | Tae-Sin Park | 2004-09-07 |
| 5769948 | Semiconductor fabricating apparatus having vacuum control and detection system | Heung-Bok Lee | 1998-06-23 |