Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417528 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Keita Kato, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2016-08-16 |
| 9250532 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2016-02-02 |
| 9086627 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, manufacturing method of electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2015-07-21 |
| 9081286 | Pattern forming method, method for producing electronic device using the same, and electronic device | Ryosuke Ueba | 2015-07-14 |
| 9075310 | Pattern forming method, multi-layered resist pattern, multi-layered film for organic solvent development, resist composition, method for manufacturing electronic device, and electronic device | Michihiro SHIRAKAWA, Keita Kato, Atsushi Nakamura, Hidenori Takahashi, Kaoru Iwato | 2015-07-07 |