Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520226 | Imprint method, imprint apparatus, imprint system, and method of manufacturing article | Tsutomu Hashimoto | 2022-12-06 |
| 7864337 | Positioning apparatus, exposure apparatus, and device manufacturing method | — | 2011-01-04 |
| 7626680 | Exposure apparatus and device fabrication method using the same | Tetsuya Mori, Yuichi Osakabe | 2009-12-01 |
| 7073185 | Objective lens driving device and optical pickup device employing the objective lens driving device | Yutaka Shimada | 2006-07-04 |