| 8148301 |
Method for polishing tape-shaped substrate for oxide superconductor, oxide superconductor, and base material for oxide superconductor |
Sanaki Horimoto, Takehiro Watanabe, Fumi Murokawa, Yuji Horie, Noriyuki Kumasaka +1 more |
2012-04-03 |
| 8143194 |
Method for polishing tape-shaped substrate for oxide superconductor, oxide superconductor, and base material for oxide superconductor |
Sanaki Horimoto, Takehiro Watanabe, Fumi Murokawa, Yuji Horie, Noriyuki Kumasaka +1 more |
2012-03-27 |
| 7776793 |
System and method for polishing surface of tape-like metallic base material |
Takehiro Watanabe, Sanaki Horimoto, Yuji Horie |
2010-08-17 |
| 7241204 |
Polishing pad, method of producing same and method of polishing |
Jun Watanabe, Jun Tamura, Takashi Arahata |
2007-07-10 |
| 7238097 |
Polishing pad and method of producing same |
Hisatomo Ohno, Toshihiro Izumi, Mitsuru Saito, Claughton Miller, Ichiro Kodaka |
2007-07-03 |
| 7044697 |
Cutting tool for simultaneous facing and grooving of CMP pad |
Ichiro Kodaka, Toshihiro Kobayashi |
2006-05-16 |
| 6413151 |
CMP slurry recycling apparatus and method for recycling CMP slurry |
Hiroshi Mizuno, Masaaki Ogitsu, Toru Kikuchi |
2002-07-02 |
