Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901162 | Vacuum processing apparatus and method of cleaning vacuum processing apparatus | Yosuke JIMBO, Yoshiaki Yamamoto, Kenji ETO, Yoichi Abe | 2024-02-13 |
| 7682481 | Vacuum processing apparatus | Seiichi Takahashi, Soo Boo Lim, Masayuki Satou, Kengo Tsutsumi, Yohei Ono | 2010-03-23 |