Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431340 | Exhaust gas processing apparatus having plasma source and substrate processing apparatus including the same | Jaehyun Kim, Kookjin Ann, Taijong Sung, Sunwoo Yook, Young Heo | 2025-09-30 |
| 12409404 | Scrubber system and wet cleaning method using the same | Young Seok Roh, Heesub Kim, Hee Ock Park, Jongyong Bae, Sung Chul Yoon +3 more | 2025-09-09 |
| 12390763 | Apparatus trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus | Uihyoung Lee, Hongsik Park, Taeheon Lee | 2025-08-19 |
| 11931683 | Scrubber system and wet cleaning method using the same | Young Seok Roh, Heesub Kim, Hee Ock Park, Jongyong Bae, Sung Chul Yoon +3 more | 2024-03-19 |
| 11738299 | Exhaust gas processing system including adsorbent for suppressing powder-like byproduct | Sunwoo Yook, Youngduk Ko, Youngseok Roh, Seoyoung Maeng, Jongyong Bae +3 more | 2023-08-29 |
| 11660563 | Apparatus for collecting by-product and method for collecting by-product | Seoyoung Maeng, Iljun Jeon, Youngseok Roh, Jongyong Bae, Jungjoon Pyeon | 2023-05-30 |
| 11549178 | Apparatus for treating semiconductor process gas and method of treating semiconductor process gas | Sunwoo Yook, Youngduk Ko, Youngseok Roh, Seoyoung Maeng, Jongyong Bae +3 more | 2023-01-10 |