| 8298847 |
MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same |
Lior Kogut, Chun-Ming Wang, Chengbin Qui, Fan Zhong |
2012-10-30 |
| 8270062 |
Display device with at least one movable stop element |
Manish Kothari, Sauri Gudlavalleti |
2012-09-18 |
| 8097174 |
MEMS device and interconnects for same |
Wonsuk Chung, Suryaprakash Ganti |
2012-01-17 |
| 8085458 |
Diffusion barrier layer for MEMS devices |
Hsin-Fu Wang, Ming-Hau Tung |
2011-12-27 |
| 7704773 |
MEMS devices having support structures with substantially vertical sidewalls and methods for fabricating the same |
Lior Kogut, Chengbin Qiu, Chun-Ming Wang, Fan Zhong |
2010-04-27 |
| 7706042 |
MEMS device and interconnects for same |
Wonsuk Chung, Suryaprakash Ganti |
2010-04-27 |
| 7660058 |
Methods for etching layers within a MEMS device to achieve a tapered edge |
Chengbin Qiu, Teruo Sasagawa, Ming-Hau Tung, Chun-Ming Wang |
2010-02-09 |
| 7652814 |
MEMS device with integrated optical element |
Fan Zhong, Chun-Ming Wang |
2010-01-26 |
| 7630114 |
Diffusion barrier layer for MEMS devices |
Hsin-Fu Wang, Ming-Hau Tung |
2009-12-08 |
| 7601571 |
Methods of manufacturing interferometric modulators with thin film transistors |
Clarence Chui |
2009-10-13 |
| 7580172 |
MEMS device and interconnects for same |
Alan G. Lewis, Manish Kothari, John Batey, Teruo Sasagawa, Ming-Hau Tung +1 more |
2009-08-25 |
| 7256922 |
Interferometric modulators with thin film transistors |
Clarence Chui |
2007-08-14 |