Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8248581 | Exposure system | Hans Opower | 2012-08-21 |
| 8027018 | Method and device for producing exposed structures | Hans Opower, Dirk Leinenbach | 2011-09-27 |
| 7705967 | Exposure system | Hans Opower | 2010-04-27 |
| 7652750 | Lithography exposure device having a plurality of radiation sources | Hans Opower | 2010-01-26 |
| 7019818 | Apparatus for exposing substrate materials | Hans Opower | 2006-03-28 |
| 6859261 | Lithography exposure device | Hans Opower | 2005-02-22 |