SC

Steven S. Cooperman

DE Digital Equipment: 3 patents #412 of 2,100Top 20%
📍 Southborough, MA: #126 of 271 inventorsTop 50%
🗺 Massachusetts: #33,482 of 88,656 inventorsTop 40%
Overall (All Time): #1,646,305 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
5494857 Chemical mechanical planarization of shallow trenches in semiconductor substrates Andre I. Nasr 1996-02-27
5492858 Shallow trench isolation process for high aspect ratio trenches Amitava Bose, Marion Garver, Andre I. Nasr 1996-02-20
5346584 Planarization process for IC trench isolation using oxidized polysilicon filler Andre I. Nasr 1994-09-13