Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8809778 | Pattern inspection apparatus and method | Ryuichi Ogino, Yoshiaki Ogiso | 2014-08-19 |
| 7791022 | Scanning electron microscope with length measurement function and dimension length measurement method | Takayuki Nakamura, Toshimichi Iwai, Mitsuo Hiroyama | 2010-09-07 |
| 5821761 | Apparatus detecting an IC defect by comparing electron emissions from two integrated circuits | Hiroshi Kawamoto, Hironobu Niijima | 1998-10-13 |
| 5757198 | Method and apparatus for detecting an IC defect using charged particle beam | Hiroshi Kawamoto, Hironobu Niijima | 1998-05-26 |
| 5592100 | Method for detecting an IC defect using charged particle beam | Hiroshi Kawamoto, Hironobu Niijima | 1997-01-07 |
| 5521517 | Method and apparatus for detecting an IC defect using a charged particle beam | Hironobu Niijima, Hiroshi Kawamoto | 1996-05-28 |