Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395086 | Shield for wafer station | — | 2002-05-28 |
| 6352904 | Alignment mark strategy for oxide CMP | Juan Boon Tan | 2002-03-05 |
| 6303451 | Method for forming a transistor within an integrated circuit | Xin Zhang, Kin Wai Tang, Carol Goh | 2001-10-16 |
| 6235437 | Multi-segment global alignment mark | Juan Boon Tan, Zadig Cheung-Ching Lam, Kay Chai Ang | 2001-05-22 |
| 6184104 | Alignment mark strategy for oxide CMP | Juan Boon Tan | 2001-02-06 |
| 6146969 | Printing optimized global alignment mark at contact/via layers | Juan Boon Tan, Phuan Yee Hwee | 2000-11-14 |
| 6022649 | Wafer stepper method utilizing a multi-segment global alignment mark | Juan Boon Tan, Zadig Cheung-Ching Lam, Kay Chai Ang | 2000-02-08 |
| 5562772 | Substrate coating apparatus | — | 1996-10-08 |
| 5470604 | Apparatus and method for spreading resist on a wafer and detecting bubbles in the resist | — | 1995-11-28 |
| 5429912 | Method of dispensing fluid onto a wafer | — | 1995-07-04 |