Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6235437 | Multi-segment global alignment mark | Soon Ee Neoh, Juan Boon Tan, Kay Chai Ang | 2001-05-22 |
| 6022649 | Wafer stepper method utilizing a multi-segment global alignment mark | Soon Ee Neoh, Juan Boon Tan, Kay Chai Ang | 2000-02-08 |
| 5734594 | Method and system for enhancement of wafer alignment accuracy | Ron Fu Chu | 1998-03-31 |