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AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,215,780 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8226142 Workpiece gripping integrity sensor Joseph Gillespie, Robert E. Wayne 2012-07-24