SW

Shaun Dean Wilson

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,586,939 of 4,157,543Top 90%
1
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Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6255662 Rutherford backscattering detection for use in Ion implantation Leonard M. Rubin, Yuri Erokhin 2001-07-03