Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761434 | Substrate holding apparatus, exposure apparatus, and article manufacturing method | Akihiro Takahashi, Noboru Osaka | 2020-09-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761434 | Substrate holding apparatus, exposure apparatus, and article manufacturing method | Akihiro Takahashi, Noboru Osaka | 2020-09-01 |