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Shunya Sakata

Canon: 1 patents #14,899 of 19,416Top 80%
Overall (All Time): #2,812,399 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10761434 Substrate holding apparatus, exposure apparatus, and article manufacturing method Akihiro Takahashi, Noboru Osaka 2020-09-01