Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8343693 | Focus test mask, focus measurement method, exposure method and exposure apparatus | Shigeru Hirukawa | 2013-01-01 |
| 8339614 | Method of measuring shot shape and mask | — | 2012-12-25 |
| 7426017 | Focus test mask, focus measurement method and exposure apparatus | — | 2008-09-16 |
| 5615006 | Imaging characteristic and asymetric abrerration measurement of projection optical system | Shigeru Hirukawa, Takeshi Kato, Kyoichi Suwa | 1997-03-25 |