Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842726 | Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrate | Stephen Daniels, Felipe Soberon, Paul Maguire | 2017-12-12 |
| 8945467 | Method and apparatus for the sterilisation of articles | Felipe Soberon, Paul Maguire, Stephen Daniels | 2015-02-03 |