Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6723664 | Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junction | Hideki Matsumura, Akira Izumi, Atsushi Masuda, Yasunobu Nashimoto, Yosuke Miyoshi +2 more | 2004-04-20 |
| 6349669 | Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junction | Hideki Matsumura, Akira Izumi, Atsushi Masuda, Yasunobu Nashimoto, Yosuke Miyoshi +2 more | 2002-02-26 |
| 6069094 | Method for depositing a thin film | Hideki Matsumura, Akira Izumi, Atsushi Masuda, Yasunobu Nashimoto, Yosuke Miyoshi +2 more | 2000-05-30 |