Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11897005 | Nozzle, substrate processing apparatus including the same, and substrate processing method | Sunmi Kim, Oh Jin Kwon | 2024-02-13 |
| 11529655 | Nozzle, substrate processing apparatus including the same, and substrate processing method | Sunmi Kim, Oh Jin Kwon | 2022-12-20 |