Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6889177 | Large area pattern erosion simulator | — | 2005-05-03 |
| 6169931 | Method and system for modeling, predicting and optimizing chemical mechanical polishing pad wear and extending pad life | — | 2001-01-02 |
| 5783497 | Forced-flow wafer polisher | Anthony J. Toprac | 1998-07-21 |
| 5562530 | Pulsed-force chemical mechanical polishing | L. Michael Eyman | 1996-10-08 |