Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11148246 | Method and device for removing material from a substrate | Daniel L. Toberman, David L. Fritsche, Michael R. Miller | 2021-10-19 |
| 10787738 | Process for the generation of thin inorganic films | Falko Abels, Daniel LOEFFLER, Hagen Wilmer, Christian Roedl, Philipp Bueschelberger | 2020-09-29 |
| 10259094 | Method and device for removing material from a substrate | Daniel L. Toberman, David L. Fritsche, Michael R. Miller | 2019-04-16 |