RS

Robert F. Sarkozy

BE Btu Engineering: 5 patents #1 of 14Top 8%
Overall (All Time): #894,670 of 4,157,543Top 25%
6
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
4854266 Cross-flow diffusion furnace Morris Simson, John H. Fabricius, Ronnie Browne, Arthur Waugh, Chiu K. S. Lai 1989-08-08
4793283 Apparatus for chemical vapor deposition with clean effluent and improved product yield 1988-12-27
4624638 CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly 1986-11-25
4573431 Modular V-CVD diffusion furnace 1986-03-04
4556584 Method for providing substantially waste-free chemical vapor deposition of thin-film on semiconductor substrates 1985-12-03
4484538 Apparatus for providing depletion-free uniform thickness CVD thin-film on semiconductor wafers Morris Simson 1984-11-27