Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4854266 | Cross-flow diffusion furnace | John H. Fabricius, Ronnie Browne, Arthur Waugh, Robert F. Sarkozy, Chiu K. S. Lai | 1989-08-08 |
| 4484538 | Apparatus for providing depletion-free uniform thickness CVD thin-film on semiconductor wafers | Robert F. Sarkozy | 1984-11-27 |