Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6259105 | System and method for cleaning silicon-coated surfaces in an ion implanter | Peter M. Kopalidis | 2001-07-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6259105 | System and method for cleaning silicon-coated surfaces in an ion implanter | Peter M. Kopalidis | 2001-07-10 |