| 5794659 |
Zero dead-leg valve structure |
William K. Tucker |
1998-08-18 |
| 5657786 |
Zero dead-leg gas control apparatus and method |
William K. Tucker |
1997-08-19 |
| 5657254 |
Process gas distribution system and method with automatic transducer zero calibration |
Dennis A. Sierk, Stephen G. Geist, Gregory L. Hayes |
1997-08-12 |
| 5508947 |
Process gas distribution system and method with automatic transducer zero calibration |
Dennis A. Sierk, Stephen G. Geist, Gregory L. Hayes |
1996-04-16 |
| 5497316 |
Process gas distribution system and method |
Dennis A. Sierk, Stephen G. Geist, Gregory L. Hayes |
1996-03-05 |
| 5329463 |
Process gas distribution system and method with gas cabinet exhaust flow control |
Dennis A. Sierk, Stephen G. Geist, Gregory Hays |
1994-07-12 |
| 5220517 |
Process gas distribution system and method with supervisory control |
Dennis A. Sierk, Stephen G. Geist, Gregory L. Hayes |
1993-06-15 |