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1997-08-12 |
| 5508947 |
Process gas distribution system and method with automatic transducer zero calibration |
Ronald R. DuRoss, Stephen G. Geist, Gregory L. Hayes |
1996-04-16 |
| 5497316 |
Process gas distribution system and method |
Ronald R. DuRoss, Stephen G. Geist, Gregory L. Hayes |
1996-03-05 |
| 5329463 |
Process gas distribution system and method with gas cabinet exhaust flow control |
Ronald R. DuRoss, Stephen G. Geist, Gregory Hays |
1994-07-12 |
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Apparatus and method for controlling functions of automated gas cabinets |
Charles W. Garrett, William H. Robinson |
1991-01-29 |