Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7136151 | Reticle gripper barrier system for lithography use | Stephen Roux | 2006-11-14 |
| 7065894 | Apparatus for kinematic registration of a reticle | — | 2006-06-27 |
| 6984474 | Reticle barrier system for extreme ultra-violet lithography | Stephen Roux | 2006-01-10 |
| 6862817 | Method and apparatus for kinematic registration of a reticle | — | 2005-03-08 |