Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12150215 | Wafer placement table | Seiya INOUE, Yuma Iwata | 2024-11-19 |
| 12108498 | Wafer placement table | Yuma Iwata, Seiya INOUE | 2024-10-01 |
| 11688590 | Electrostatic-chuck heater | Yutaka Unno | 2023-06-27 |
| 11664203 | Electrostatic-chuck heater | Yutaka Unno | 2023-05-30 |
| 11223302 | Electrostatic chuck having an annular outer region covered by an insulating film | Nobuyuki Kondou, Yutaka Unno | 2022-01-11 |
| 10199245 | Ceramic heater, heater electrode, and method for manufacturing ceramic heater | Kazuhiro Nobori, Takuji Kimura | 2019-02-05 |