Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716764 | Method of forming first level of metallization in DRAM chips | Christophe Girard, Stephane Thioliere | 2004-04-06 |
| 6417072 | Method of forming STI oxide regions and alignment marks in a semiconductor structure with one masking step | Philippe Coronel, Philippe Lacombe | 2002-07-09 |
| 6363294 | Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision | Philippe Coronel, Jean Canteloup, Jean-Phillippe Vassilakis | 2002-03-26 |
| 6297089 | Method of forming buried straps in DRAMs | Philippe Coronel, Edith Lattard | 2001-10-02 |
| 6281068 | Method for buried plate formation in deep trench capacitors | Philippe Coronel, David Cruau, Francois Leverd, Eric Mass | 2001-08-28 |
| 6258727 | Method of forming metal lands at the M0 level with a non selective chemistry | — | 2001-07-10 |
| 5930585 | Collar etch method to improve polysilicon strap integrity in DRAM chips | Phillipe Coronel | 1999-07-27 |
| 5874345 | Method for planarizing TEOS SiO.sub.2 filled shallow isolation trenches | Philippe Coronel, Frederic Lebrun | 1999-02-23 |