| 6363294 |
Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision |
Philippe Coronel, Renzo Maccagnan, Jean-Phillippe Vassilakis |
2002-03-26 |
| 5898500 |
Device and method for three-dimensional measurements and observation in situ of a surface layer deposited on a thin-film stack |
Roland Kleim |
1999-04-27 |
| 5807761 |
Method for real-time in-situ monitoring of a trench formation process |
Philippe Coronel |
1998-09-15 |
| 5748296 |
Method and device for in situ quantification, by reflectometry, of the morphology of a localized region during etching of the surface layer of a thin-film structure |
— |
1998-05-05 |
| 5658418 |
Apparatus for monitoring the dry etching of a dielectric film to a given thickness in an integrated circuit |
Philippe Coronel |
1997-08-19 |
| 5648849 |
Method of and device for in situ real time quantification of the morphology and thickness of a localized area of a surface layer of a thin layer structure during treatment of the latter |
Jacky Mathias |
1997-07-15 |
| 5355217 |
Assembly for simultaneous observation and laser interferometric measurements, in particular on thin-film structures |
Jacky Mathias |
1994-10-11 |
| 4676644 |
Device for monitoring the thickness of thin layers |
— |
1987-06-30 |
| 4207834 |
Process and devices for the elaboration of preforms for optical fibers |
Alain Mocellin, Michel A. Braguier, Roger J. Tueta |
1980-06-17 |
