Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818534 | Substrate processing apparatus arranged in process chamber and operating method thereof | Ki Bum Kim, Seung Youb SA, Myung-jin Lee, Seung Dae CHOI, Jong Sung Choi +1 more | 2020-10-27 |
| 10229849 | Substrate processing apparatus arranged in process chamber and operating method thereof | Ki Bum Kim, Seung Youb SA, Myung-jin Lee, Seung Dae CHOI, Jong Sung Choi +1 more | 2019-03-12 |