Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5996594 | Post-chemical mechanical planarization clean-up process using post-polish scrubbing | Sudipto Ranendra Roy, Iqbal Ali, Gregory B. Shinn, Shelley H. Peterman, Srini Raghavan | 1999-12-07 |