Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171019 | Substrate treating apparatus, method for measuring discharge amount by using the same, and substrate treating method | Jaeyong Kim, Taekyoub Lee | 2021-11-09 |
| 10446425 | Substrate treating system | Junghwan Lee | 2019-10-15 |
| 10079163 | Unit for supplying treatment liquid and apparatus for treating substrate | Hyunwoo Lee | 2018-09-18 |