Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171019 | Substrate treating apparatus, method for measuring discharge amount by using the same, and substrate treating method | Jaeyong Kim, Raetaek Oh | 2021-11-09 |
| 10335836 | Method and apparatus for treating substrate | — | 2019-07-02 |
| 9355835 | Method and apparatus for processing substrate | — | 2016-05-31 |