Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964517 | Use of a biased precoat for reduced first wafer defects in high-density plasma process | — | 2011-06-21 |
| 7455448 | Rapid thermal anneal equipment and method using sichrome film | Eric Beach, Barbara Barnes | 2008-11-25 |
| 7384855 | Resistor integration structure and technique for noise elimination | H. Jerome Barber, Thomas Kuehl | 2008-06-10 |
| 7354854 | Nickel silicide method and structure | — | 2008-04-08 |
| 7323751 | Thin film resistor integration in a dual damascene structure | Eric Beach | 2008-01-29 |
| 7196398 | Resistor integration structure and technique for noise elimination | H. Jerome Barber, Thomas Kuehl | 2007-03-27 |
| 6734076 | Method for thin film resistor integration in dual damascene structure | Eric Beach | 2004-05-11 |
| 6664166 | Control of nichorme resistor temperature coefficient using RF plasma sputter etch | Chandrakant Patadia | 2003-12-16 |
| 6517235 | Using refractory metal silicidation phase transition temperature points to control and/or calibrate RTP low temperature operation | Zhong Yun Zhu, Haznita Abd Karim, Bei Chao Zhang, Johnny Cham, Ravi Sankar Yelamanchi +1 more | 2003-02-11 |