Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE41266 | Composite electrode for plasma processes | Eric H. Lenz | 2010-04-27 |
| 5074456 | Composite electrode for plasma processes | Eric H. Lenz | 1991-12-24 |
| 4728252 | Wafer transport mechanism | Christopher O. Lada, Robert T. LoBianco | 1988-03-01 |