RG

R. Michael Greig

AM AMD: 2 patents #3,994 of 9,279Top 45%
Overall (All Time): #2,225,227 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6215896 System for enabling the real-time detection of focus-related defects Robert T. Stone, Mark Shackelford 2001-04-10
5859964 System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes Qingsu Wang, Gerald W. Barnett, Yi Cheng 1999-01-12