| 9149392 |
Casting apparatus |
BING-TANG ZHONG, Yueh-Lin Chung |
2015-10-06 |
| 7572320 |
Method and apparatus for removing high concentration ozone from a waste gas steam |
Shaw-Yi Yan, Sheng-Jen Yu, Shou-Nan Li, Chang-Fu Hsu |
2009-08-11 |
| 6569253 |
Method of cleaning a chamber of a CVD machine and elements within |
Wei-Hsu Wang, Tsan-Chi Chu, Cheng Yao, Wei-Hao Lee |
2003-05-27 |
| 6315834 |
Method for removing extraneous matter by using fluorine-containing solution |
Tsung-Lin Lu, Hunter Chung, Chin-Hsien Chen, Weng-Yi Chen, Jack Yao +1 more |
2001-11-13 |
| 6303939 |
Wafer mapping apparatus |
Tsung-Lin Lu |
2001-10-16 |
| 6217640 |
Exhaust gas treatment apparatus |
Tsung-Lin Lu, Jing-Yi Huang, Frank H. Y. Chung |
2001-04-17 |
| 6218320 |
Method for improving the uniformity of wafer-to-wafer film thickness |
Tsung-Lin Lu, Yun-Sueng Liou, Yung-Chun Wen, Tsang-Jung Lin |
2001-04-17 |
| 6210754 |
Method of adjusting for parallel alignment between a shower head and a heater platform in a chamber used in integrated circuit fabrication |
Tsung-Lin Lu, Tso-Lung Lai |
2001-04-03 |
| 6011402 |
Electro-optic apparatus and method for measuring electric-field vector |
Wen-Kai Kuo, Sheng-Lung Huang, Liang Chang, Hsiao-Yu Chou, Wen-Fa Chen |
2000-01-04 |