Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7354778 | Method for determining the end point for a cleaning etching process | Tobias Hoerning, Ralf Otto | 2008-04-08 |
| 7018781 | Method for fabricating a contact hole plane in a memory module | Hans-Georg Fröhlich, Oliver Genz, Werner Graf, Stefan Gruss, Matthias Handke +6 more | 2006-03-28 |