| 8191364 |
Method for controlling pump of working machine |
Yoshiyuki Shimada, Tetsuya Yoshino, Yuya Kanenawa, Yutaka Yokoyama, Takayasu Kitai |
2012-06-05 |
| 7195024 |
Chemical supply system |
Takahisa Nitta, Yoshiaki Yamaguchi |
2007-03-27 |
| 6764212 |
Chemical supply system |
Takahisa Nitta, Yoshiaki Yamaguchi |
2004-07-20 |
| 6630031 |
Surface purification apparatus and surface purification method |
Takahisa Nitta |
2003-10-07 |
| 6610168 |
Resist film removal apparatus and resist film removal method |
Takahisa Nitta |
2003-08-26 |
| 6533902 |
Ultraviolet processing apparatus and ultraviolet processing method |
Takahisa Nitta |
2003-03-18 |
| 6503464 |
Ultraviolet processing apparatus and ultraviolet processing method |
Takahisa Nitta |
2003-01-07 |
| 6325081 |
Washing apparatus and washing method |
Takahisa Nitta, Yasuyuki Harada, Tadahiro Ohmi |
2001-12-04 |
| 6258411 |
Industrial material with fluorine passivated film and process of manufacturing the same |
Tadahiro Ohmi, Kazuo Chiba, Yutaka Mikasa, Kenji Ishigaki, Matagoro Maeno +1 more |
2001-07-10 |
| 6129098 |
Apparatus for injecting constant quantitative chemicals and a method thereof |
Takahisa Nitta, Tadahiro Ohmi, Nobukazu Ikeda, Naofumi Yasumoto |
2000-10-10 |
| 5382423 |
Apparatus for recovering calcium fluoride from fluoroetchant |
Tadahiro Ohmi, Hiroyuki Harada, Toshiro Fukutome, Matagoro Maeno, Norio Terasawa +2 more |
1995-01-17 |
| 5362461 |
Method for recovering calcium fluoride from fluoroetchant |
Tadahiro Ohmi, Hiroyuki Harada, Toshiro Fukutome, Matagoro Maeno, Norio Terasawa +2 more |
1994-11-08 |
| 5318706 |
Method of supplying dilute hydrofluoric acid and apparatus for use in this method for supplying the acid |
Tadahiro Ohmi, Matagoro Maeno, Ryozi Hirayama |
1994-06-07 |
| 5149378 |
Tungsten film forming apparatus |
Tadahiro Ohmi, Matagoroh Maeno, Hirohisa Kikuyama |
1992-09-22 |
| 4923530 |
Brazing flux of stable suspension for aluminum material |
Toshiro Fukudome, Takesi Kaibori |
1990-05-08 |
| 4806332 |
Method for preventing anhydrous potassium fluoride from solidification |
— |
1989-02-21 |
| 4795582 |
Surface treating composition for micro processing |
Tadahiro Ohmi, Hirohisa Kikuyama |
1989-01-03 |
| 4668497 |
Process for purifying hydrogen fluoride |
— |
1987-05-26 |