Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7964108 | Regeneration method of etching solution, an etching method and an etching system | Haruru Watatsu | 2011-06-21 |
| 7713478 | Equipment and method for measuring silicon concentration in phosphoric acid solution | Haruru Watatsu, Hideo Yata | 2010-05-11 |
| 7238295 | Regeneration process of etching solution, etching process, and etching system | Mitsugu Murata | 2007-07-03 |
| 6444589 | Method and apparatus for etching silicon | Akira Yoneya, Noriyuki Kobayashi | 2002-09-03 |