Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11573496 | Method of reducing effects of lens heating and/or cooling in a lithographic process | Martijn Cornelis Schaafsma | 2023-02-07 |
| 10948832 | Lithographic method and apparatus | Robertus Martinus Alphonsus Van Herpen, Mark Louwrens Beks, Lense Hendrik-Jan Maria Swaenen, Nico Vanroose, James Robert DOWNES | 2021-03-16 |
| 10564555 | Method of reducing effects of reticle heating and/or cooling in a lithographic process | Mark Jan Hendrik Luttikhof | 2020-02-18 |
| 10451977 | Lithographic method and apparatus | Nico Vanroose, Johannes Jacobus Matheus Baselmans | 2019-10-22 |
| 10429749 | Method of reducing effects of reticle heating and/or cooling in a lithographic process | Mark Jan Hendrik Luttikhof | 2019-10-01 |