Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211729 | Member for semiconductor manufacturing apparatus | Shinya Yoshida, Tatsuya KUNO, Seiya INOUE, Taro USAMI, Kenji YONEMOTO +1 more | 2025-01-28 |
| 12211726 | Member for semiconductor manufacturing apparatus | Seiya INOUE, Tatsuya KUNO, Kenji YONEMOTO | 2025-01-28 |
| 11515180 | Wafer-heating device | Hiroshi Takebayashi, Kengo Torii | 2022-11-29 |
| 10930539 | Electrostatic chuck heater | Rishun Kin, Hiroshi Takebayashi | 2021-02-23 |
| 10668558 | Metal wiring bonding structure and production method therefor | Hiroshi Takebayashi, Rishun Kin | 2020-06-02 |
| 10483146 | Electrostatic chuck heater | Hiroshi Takebayashi, Shinya Hasegawa | 2019-11-19 |
| 10029328 | Metal wiring bonding structure and production method therefor | Rishun Kin, Hiroshi Takebayashi | 2018-07-24 |