Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5167716 | Method and apparatus for batch processing a semiconductor wafer | Charles A. Boitnott | 1992-12-01 |
| 4315479 | Silicon wafer steam oxidizing apparatus | Robert B. Champagne | 1982-02-16 |
| 4268538 | High-pressure, high-temperature gaseous chemical method for silicon oxidation | Raphael Klein | 1981-05-19 |