Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10378100 | Sputtering apparatus and recording medium for recording control program thereof | Nobuo Yamaguchi, Koji Tsunekawa, Naoki Watanabe | 2019-08-13 |
| 8415753 | Semiconductor device and method of manufacturing the same | Takashi Nakagawa, Naomu Kitano, Kazuaki Matsuo, Toru Tatsumi | 2013-04-09 |
| 8088678 | Semiconductor manufacturing apparatus and method | Naomu Kitano, Takashi Minami, Heiji Watanabe | 2012-01-03 |
| 8026143 | Semiconductor element and manufacturing method thereof | Naomu Kitano, Takashi Minami, Heiji Watanabe | 2011-09-27 |
| 7857946 | Sputtering film forming method, electronic device manufacturing method, and sputtering system | Naomu Kitano, Naoki Yamada, Takaaki Tsunoda, Nobuo Yamaguchi | 2010-12-28 |
| 7655549 | Method for depositing a metal gate on a high-k dielectric film | Wickramanayaka Sunil, Naoki Yamada, Naomu Kitano | 2010-02-02 |