Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421596 | Method and apparatus for processing surface of a semiconductor substrate | Pasi MERILÄINEN, Patrick Rabinzohn, Markus BOSUND | 2025-09-23 |
| 10590536 | Apparatus, method and reaction chamber | Pekka Soininen, Jarmo Maula | 2020-03-17 |
| 10472150 | Package wrapping including PLA film with moisture barrier by atomic layer deposition | Andries Don Sebastian, Sami Sneck | 2019-11-12 |
| 10385450 | Method of coating a substrate and an apparatus | Pekka Soininen, Paavo Timonen | 2019-08-20 |
| 10167551 | Apparatus, method and reaction chamber | Pekka Soininen, Jarmo Maula | 2019-01-01 |
| 7111030 | Method of detecting pilot tones in a noisy signal | Antti Pietilainen, Simo Tammela | 2006-09-19 |