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Sputter trap having a thin high purity coating layer and method of making the same |
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Sputter trap having a thin high purity coating layer and method of making the same |
Jaeyeon Kim, Patrick Underwood, Susan D. Strothers, Shih-Yao Lin, Scott R. Sayles |
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Sputter trap having multimodal particle size distribution |
Jaeyeon Kim, Patrick Underwood, Susan D. Strothers, Scott R. Sayles |
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Sputter trap having multimodal particle size distribution |
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Manufacturing design and processing methods and apparatus for sputtering targets |
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