Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9385003 | Residue free systems and methods for isotropically etching silicon in tight spaces | Qinghua Zhong, Helene Del Puppo, Ganesh Upadhyaya, Gowri Kamarthy | 2016-07-05 |
| 8999184 | Method for providing vias | Siyi Li, Yifeng Zhou, Ratndeep SRIVASTAVA, Tae Won Kim, Gowri Kamarthy | 2015-04-07 |